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Pirani Vacuum Gauge

thermovacThe measurement principle of the Pirani utilizes the thermal conductivity of gases for pressure readings. The THERMOVAC pressure gauges from Leybold Vacuum are equipped with a MEMS-Pirani sensing cell that consists of a silicon chip with a heated resistive element. These THERMOVAC sensors measure the pressure range from 760-10-5 Torr. For chemical and aggressive applications, we recommend using a C version as these are equipped with a Paralyene HT coated sensor, offering the utmost reliability for the harshest vacuum applications. All THERMOVAC sensors are equipped with a 360 degree LED-ring showing the status of the sensor. These sensors require the use of either our DISPLAY or GRAPHIX operating unit for power supply and pressure readout.

Advantages of the THERMOVAC:

Very reliable, industrial-grade solid state MEMS-Pirani resistant to vibrations and shock venting of vacuum systems.

  • Reduced response times due to improved signal processing
  • High accuracy
  • High reproducibility
  • Measurement signal insensitive to mounting orientation
  • Robust stainless steel housing
  • Available with a display for pressure units, set point parameters and operation status
  • LED ring to indicate the status of the sensor
  • Long tube version for reaching higher chamber bakeout temperatures

Typical Applications:

  • Analytical Instrumentation
  • Research & Development
  • Vacuum Drying
  • Controlling of ion gauges
  • Activation of UHV gauges
  • System process control
  • Process industry
  • Coated versions for improved chemical resistance
  • General roughing line vacuum measurement

For help with your pressure management needs, contact Ready to purchase? Visit our online store and place your order now.

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