Scroll Vacuum Pump
The dry compressing SCROLLVAC plus pumps operate on the principle of a scroll compressor. Two or more Archimedes spirals engaging each other. The vacuum is generated by reducing the volume of the pockets and compressing gases from the outside towards the inside thereby pumping the gases. SCROLLVAC pumps operate absolutely oil-free with a high effective pumping speed in the whole range of operation.
Typical applications for the SCROLLVAC plus include:
- Electron beam welding
- Leak Detection systems
- Accelerators / synchrontrons
- Surface analysis instruments
- Scanning electron microscopes
- Load lock
- Lamp manufacturing
- As a backing pump for turbomolecular pump systems
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