The TURBOVAC MAG digital line are flexible, vibration-free and low-maintenance turbomolecular pumps with separate frequency converter. The customized magnetic rotor suspension design provides vacuum performance optimized to different process requirements and perform well in applications where low noise, extremely low vibration or hydrocarbon-free vacuum conditions are important. As well in applications with corrosive gases or for analytical instruments and research and development. This virtually maintenance-free pump offers stable system performance while providing the highest pumping speed and compression rates for all process gases.
The TURBOVAC MAG digital is suitable for applications such as:
- industrial coating systems
- all major semiconductor processes such as Etch, CVD, PVD and Ion Implantation
- well-proven in the display industry
- CF versions are suitable for particle accelerators and research applications
For more information about the TURBOVAC MAG digital turbomolecular pump, contact us at firstname.lastname@example.org or visit our online store.