DIJ 630

DIJ 630

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VACUUM PUMPS

MaxCool 2500L Cryochiller

SKU:

22228V000

Overview

The Edwards Polycold MAXCOOL 2500L is a closed-loop cryogenic refrigeration system that provides up to 2,500 watts of cooling for water-vapour capture and low-temperature process applications. By cooling a cryocoil or chevron baffle inside a vacuum chamber, it freezes water vapour and other condensable substances onto the cold surface, helping shorten pumpdown times and reduce moisture during processing. Applications include optical coating, vacuum metallization, and thin-film deposition, where moisture control supports improved film quality, adhesion, and repeatability. The MAXCOOL 2500L also provides cryogenic cooling for electrostatic chucks used in semiconductor wafer processing, reaching temperatures as low as approximately −145°C under no-load conditions.

Key Specifications

Manufacturer: Leybold
Product Name: DIJ 630
Product Type: Oil Diffusion Pump
Category: Vacuum Pumps
Subcategory: Diffusion Pumps
Pump Series: DIJ
Pump Type: Oil Diffusion Pump
Vacuum Range: High Vacuum
High Vacuum Connection: DN 630 ISO-K / 20" ANSI
Forevacuum Connection: DN 160 ISO-K / 4" ANSI
Nominal Pumping Speed: 10,800 l/s
Gas Throughput: 17 mbar l/s
Ultimate Total Pressure: < 5 × 10⁻⁷ mbar
Heating Power: 10.8 kW
Application: High vacuum systems, coating systems, research, industrial vacuum processes, and system integration

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