LEYBOJET® 630

LEYBOJET® 630

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VACUUM PUMPS

MaxCool 2500L Cryochiller

SKU:

502180

Overview

The Edwards Polycold MAXCOOL 2500L is a closed-loop cryogenic refrigeration system that provides up to 2,500 watts of cooling for water-vapour capture and low-temperature process applications. By cooling a cryocoil or chevron baffle inside a vacuum chamber, it freezes water vapour and other condensable substances onto the cold surface, helping shorten pumpdown times and reduce moisture during processing. Applications include optical coating, vacuum metallization, and thin-film deposition, where moisture control supports improved film quality, adhesion, and repeatability. The MAXCOOL 2500L also provides cryogenic cooling for electrostatic chucks used in semiconductor wafer processing, reaching temperatures as low as approximately −145°C under no-load conditions.

Key Specifications

Key Specifications

Product Number: 502180
Pump Type: Oil diffusion pump
Cooling Method: Water-cooled
High Vacuum Connection: DN 630 ISO-F
Forevacuum Connection: DN 160 ISO-K
Pumping Speed for Air at 1.0 × 10⁻² mbar: 1,700 l/s
Pumping Speed for Air at 1.0 × 10⁻³ mbar: 12,000 l/s
Pumping Speed for Air below 1.0 × 10⁻⁴ mbar: 12,000 l/s
Operating Range: < 10⁻² mbar
Max. Permissible Forevacuum Pressure: 6 × 10⁻¹ mbar
Pump Fluid Filling: 5.0 / 8.0 L min./max.
Heating Power: 10.8 kW
Number of Heating Cartridges: 9
Heating Up Time: < 30 min
Cooling Water Minimum Throughput: 500 l/h
Weight: 145 kg / 320 lb

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