Maxcool 2500L Cryochiller

Maxcool 2500L Cryochiller

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VACUUM PUMPS

MaxCool 2500L Cryochiller

SKU:

Maxcool 2500L

Overview

The Edwards Polycold MAXCOOL 2500L is a closed-loop cryogenic refrigeration system that provides up to 2,500 watts of cooling for water-vapour capture and low-temperature process applications. By cooling a cryocoil or chevron baffle inside a vacuum chamber, it freezes water vapour and other condensable substances onto the cold surface, helping shorten pumpdown times and reduce moisture during processing. Applications include optical coating, vacuum metallization, and thin-film deposition, where moisture control supports improved film quality, adhesion, and repeatability. The MAXCOOL 2500L also provides cryogenic cooling for electrostatic chucks used in semiconductor wafer processing, reaching temperatures as low as approximately −145°C under no-load conditions.

Key Specifications

Key Specifications

Manufacturer: Edwards / Polycold
Product Type: Cryochiller / Cryogenic refrigeration system
Cooling Capacity: Up to 2,500 W
Temperature Range: -120 to -145 °C / 153 to 128 K
Water Vapor Pumping Speed: 10,000 to 140,000 l/s
Theoretical Maximum Pumping Speed: 208,600 l/s
Ultimate Vacuum Level: Up to 1 × 10⁻⁹ mbar / 8 × 10⁻¹⁰ Torr
System Type: Closed-loop cryogenic refrigeration
Cooling Application: Cryocoils, chevron baffles, cold traps, electrostatic chucks
Application Range: High-vacuum systems, semiconductor processing, coating, deposition, and water vapor pumping
Operation: Captures water vapor by freezing it onto a cold surface

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