DIP® 12000

DIP® 12000

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VACUUM PUMPS

MaxCool 2500L Cryochiller

SKU:

500591

Overview

The Edwards Polycold MAXCOOL 2500L is a closed-loop cryogenic refrigeration system that provides up to 2,500 watts of cooling for water-vapour capture and low-temperature process applications. By cooling a cryocoil or chevron baffle inside a vacuum chamber, it freezes water vapour and other condensable substances onto the cold surface, helping shorten pumpdown times and reduce moisture during processing. Applications include optical coating, vacuum metallization, and thin-film deposition, where moisture control supports improved film quality, adhesion, and repeatability. The MAXCOOL 2500L also provides cryogenic cooling for electrostatic chucks used in semiconductor wafer processing, reaching temperatures as low as approximately −145°C under no-load conditions.

Key Specifications

Key Specifications
Frequency: 60 Hz
Pumping Speed for Air: 12,000 l/s
Ultimate Total Pressure: < 5.0 × 10⁻⁷ mbar / < 3.8 × 10⁻⁷ Torr
Intake Connection: DN 500 ISO-K
Exhaust Connection: DN 100 ISO-K
Operating Pressure Range: 10⁻² to 10⁻⁷ mbar

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