Overview
The Leybold DRYVAC DV 200 LVO 410 is a 210 m³/h, water-cooled dry screw vacuum pump designed for clean, reliable and chemically demanding vacuum applications. Its oil-free compression eliminates process contamination associated with conventional oil-sealed pumps, while the LVO 410 PFPE lubrication system provides enhanced compatibility for applications involving reactive or corrosive process gases and specified oxygen service. With a 7.5 kW three-phase motor and compact DN 63 ISO-K inlet, the DV 200 is ideally suited for PVD and thin-film coating, plasma processing, semiconductor manufacturing, vacuum heat treatment, drying, electron-beam welding and other demanding industrial and research applications. The LVO 410 configuration is particularly valuable when process compatibility and contamination control are more important than simply maximizing pumping capacity.
Key Specifications