DRYVAC DV 200, 3-ph, 380-460VAC, 50/60Hz

DRYVAC DV 200, 3-ph, 380-460VAC, 50/60Hz

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VACUUM PUMPS

MaxCool 2500L Cryochiller

SKU:

112020V15

Overview

The Edwards Polycold MAXCOOL 2500L is a closed-loop cryogenic refrigeration system that provides up to 2,500 watts of cooling for water-vapour capture and low-temperature process applications. By cooling a cryocoil or chevron baffle inside a vacuum chamber, it freezes water vapour and other condensable substances onto the cold surface, helping shorten pumpdown times and reduce moisture during processing. Applications include optical coating, vacuum metallization, and thin-film deposition, where moisture control supports improved film quality, adhesion, and repeatability. The MAXCOOL 2500L also provides cryogenic cooling for electrostatic chucks used in semiconductor wafer processing, reaching temperatures as low as approximately −145°C under no-load conditions.

Key Specifications

Key Specifications

Max. Effective Pumping Speed: 210 m³/h / 123.6 CFM
Ultimate Pressure: < 0.05 mbar / < 0.038 Torr
Electrical Connection: 3-phase, 380–460 V or 200–240 V ±10%, 50/60 Hz
Phase: 3-phase
Permissible Ambient Temperature: +5 to +50 °C / +41 to +122 °F
Water Vapor Tolerance: 50 mbar / 37.5 Torr
Water Vapor Capacity: 5 kg/h
Noise Level: 65 dB(A)
Power Consumption at Ultimate Pressure: 4.1 kW
Nominal Power: 7.5 kW
Nominal Current at 400 V: 13.8 A
Intake Connection: DN 63 ISO-K
Exhaust Connection: DN 40 ISO-KF
Cooling Method: Water-cooled
Protective Class: IP54
Weight: 370 kg / 815.7 lb
Dimensions: 1115 × 612 × 478 mm / 43.9 × 24.1 × 18.8 in
Cooling Water Connection: G 1/2
Cooling Water Temperature: 5 to 35 °C / 41 to 95 °F
Cooling Water Throughput: 8 l/min / 2.11 US gal/min
Purge Gas Connection: D10
Pump Type: Dry screw vacuum pump

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