TRIVAC D65B - PFPE

TRIVAC D65B - PFPE

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VACUUM PUMPS

MaxCool 2500L Cryochiller

SKU:

11399

Overview

The Edwards Polycold MAXCOOL 2500L is a closed-loop cryogenic refrigeration system that provides up to 2,500 watts of cooling for water-vapour capture and low-temperature process applications. By cooling a cryocoil or chevron baffle inside a vacuum chamber, it freezes water vapour and other condensable substances onto the cold surface, helping shorten pumpdown times and reduce moisture during processing. Applications include optical coating, vacuum metallization, and thin-film deposition, where moisture control supports improved film quality, adhesion, and repeatability. The MAXCOOL 2500L also provides cryogenic cooling for electrostatic chucks used in semiconductor wafer processing, reaching temperatures as low as approximately −145°C under no-load conditions.

Key Specifications

Manufacturer: Leybold
Pump Type: Oil-sealed rotary vane vacuum pump
Product Line: TRIVAC B
Category: Oil Sealed Pumps / Rotary Vane Pumps
Classification: Wet pump
Operation: Two-stage oil-sealed rotary vane
PFPE Configuration: Yes
Pumping Speed at 50 Hz: 0.018 m³/s / approx. 64.8 m³/h
Pumping Speed at 60 Hz: 0.022 m³/s / approx. 79.2 m³/h
Ultimate Pressure: 0.200 Pa / 2 × 10⁻³ mbar
Max. Water Vapor Pressure: 4000 Pa / 40 mbar
Leak Rate: 1.000 × 10⁻⁴ Pa·m³/s
Inlet Connection: DN 40 ISO-KF / NW40
Outlet Connection: DN 40 ISO-KF / NW40
Noise Level: 57 dB(A)
Rated Power: 2200 W
Power at Ultimate: 1320 W
Power at Atmosphere: 2200 W
Nominal Rotational Speed: 25 Hz at 50 Hz / 30 Hz at 60 Hz
Dimensions: 797 × 255 × 357 mm
Weight: 84.5 kg

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