Overview
The Leybold VARODRY VD 65 HD/O₂ is a compact, oil-free dry screw vacuum pump specifically configured for demanding applications involving oxygen, aggressive process gases and vapours. Delivering approximately 65 m³/h (38 CFM) of pumping speed, the VD 65 HD/O₂ combines the clean operation of dry screw technology with specialized construction designed for challenging process conditions.
The 230/460 V, 60 Hz, three-phase configuration with purge uses a 1.5 kW air-cooled motor and incorporates a dedicated purge system, stainless-steel components and specialized PEEK blow-off components. This construction provides additional protection when process gases or vapours could otherwise contaminate or adversely affect a conventional vacuum pump.
Because the VD 65 HD/O₂ contains no vacuum oil in the compression process, it eliminates oil changes, oil disposal and oil backstreaming while providing a cleaner vacuum environment. The integrated purge capability further improves protection against process contamination and makes the pump particularly attractive for demanding gas-handling applications.
Typical applications include oxygen service, industrial gas handling, chemical processing, vacuum drying, degassing, heat treatment, battery manufacturing, plasma processing, PVD and coating, semiconductor applications and other processes where oil-free vacuum and enhanced process compatibility are required.
The VD 65 HD/O₂ is an excellent choice when a standard dry pump is not enough and the customer needs a compact pump specifically configured for oxygen and aggressive-process applications.
The VD 65 HD/O₂ isn't simply an oil-free pump—it's an oil-free pump engineered for the process gases that can destroy conventional pumps.
Key Specifications